Model No. LPR1016-FS1515:

Stand-alone Reflectometer with a Clean Vacuum Robotic Sample Transfer System for the Metrology of EUV Mask Blank Coatings using a Laser Plasma Source

Specifications of the EUV Reflectometer Model No. LPR1016-FS1515:
· Wavelength precision (1 s): 0.001 nm (0.008%)
· Reflectivity precision (1 s): 0.3% absolute
· Can obtain a complete reflectance measurement in less than 30 seconds
· Wavelength range: 10 to 16 nm
· Data rate: 1 point/sec or greater at 1 laser shot per point
· 350,000 shots per target change (about 10,000 reflectance measurements without changing the laser target).
Measurement area: 152 mm x 152 mm mask blanks with positioning accuracy of 0.1 mm
· Substrate thickness: up to 6.25 mm.
· Designed to measure reflectivity at 84 degrees angle.
· Class 1 cleanroom compatible.
· Measurement spot size: less than 5 mm diameter
· Footprint of the instrument is less than 2.0 m by 2.0 m.
· User friendly LabView based software to control the instrument and to analyze the reflectance measurements.
· Extremely reliable MESC compatible vacuum mask blank handling robot (MCBF of 10,000,000) to transfer the mask blanks from a standard container (RSP 200).